Cleanroom Technical Information
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Basics of... Cleanrooms
Cleanrooms are classified according to the number and size of particles permitted per volume of air. ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. ISO 14644-1 Standards specify the decimallogarithm of the number of particles 0.1 µm or larger permitted per cubic meter of air.
ISO 14644-1 Cleanroom Standards
| Maximum Particles/m3 | ||||||
≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm | FED STD 209E | |
ISO 1 | 10 | 2 |
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ISO 2 | 100 | 24 | 10 | 4 |
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ISO 3 | 1,000 | 237 | 102 | 35 | 8 |
| Class 1 |
ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 |
| Class 10 |
ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 | Class 100 |
ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | Class 1000 |
ISO 7 |
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| 352,000 | 83,200 | 2,930 | Class 10,000 |
ISO 8 |
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| 3,520,000 | 832,000 | 29,300 | Class 100,000 |
ISO 9 |
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| 35,200,000 | 8,320,000 | 293,000 | Room Air |
Minimum Protective Apparel Guide
| ISO Class 8 | ISO Class 7 | ISO Class 6 | ISO Class 5 | ISO Class 4 |
Hair Cover | X | X | X | X | X |
Face Mask |
| X | X | X | X |
Coveralls |
|
| X | X | X |
Shoe Covers | X | X | X | X | X |
Gloves |
|
| X | X | X |
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